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Ultraviolet-assisted processing of dielectric thin films for metal oxide semiconductor applications (2002)

Author: Howard, Joshua M
Publisher: Gainesville, FL,
Possible copyright status: Explicit permission granted by author.
Language: English
Digitizing sponsor: University of Florida, George A. Smathers Libraries with support from LYRASIS and the Sloan Foundation
Book contributor: University of Florida, George A. Smathers Libraries
Collection: UFRDS; univ_florida_smathers; americana

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http://uf.catalog.fcla.edu/uf.jsp?st=UF029646702&ix=pm&I=0&V=D&pm=1

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